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Mitutoyo - Полный каталог инструмента - 2012-2013 Английский язык
для размещения заказа - mitutoyo@mitutoyo-tools.ru
M-NanoCoord
Specifications 3D CNC Ultra High Resolution Measuring System
• Newly developed measuring machine capable of the most precise movements for unsurpassed
Main Structure
Unit XY-plane guiding structure form measurement accuracy in the nanometre region.
• Laser Holoscales with one nanometre resolution and virtually zero thermal expansion provide
Guiding method
Hydrostatic air bearing extreme measuring accuracy of (0,2+0,1L/100) µm.
• Fixed bridge, moving table construction.
Scales • High-precision air bearings.
Low-expansion laser holoscale • Particularly suitable for workpieces with very small dimensions, such as MEMS parts, integrated
Vision - Programmable Power Turret (PPT) circuits, precision formed components, aspheric lenses.
Head - 4-quadrant LED (PRL) • Every model of the M-NanoCoord Series has a newly developed ultra-high accuracy main unit
- High-sensitivity megapixel CCD camera
with a vision probe as a standard accessory.
Factory - UMAP Probes (touch signal probe with a • Can be equipped with probe systems (factory option).
options micro stylus)
(Refer the UMAP page for details)
UMAP 101
15µm ; L=0,2 mm
UMAP 103
30 µm ; L=2 mm
UMAP 107
70 µm ; L=5 mm
UMAP 110
100 µm ; L=10 mm
UMAP 130
300 µm ; L=16 mm
- Minute Form Probe LNP (ultra-low
measuring force, contact-type probe)
Equipped with high performance contact-
type probe system "Long-range Nano Probe"
M-NanoCoord
No. Range (X, Y, Z-axis) Resolution Accuracy (1)
M-NanoCoord 200 x 200 x 100 mm 1 nm E1(x,y) = (0,2+0,1L/100) µm
(1) According to Mitutoyo inspection method L = measuring length (mm)
Example of an M-NanoCoord-LNP measurement application
LNP Probe : Long range Nano Probe
LNP allows measurement of minute features on
workpieces such as light guide plates, using a
diamond stylus with tip radius of 2 µm (optional).
LNP allows scanning measurement with steeply-
inclined surfaces of ±80° and touch-probe
measurement of ±90° by vibration-type contact
scanning probe with ultra-low measuring force
(min. measuring force : 10 µN).
Aspherical lens measurement result Aspherical lens analysis by lens section comparison
The prices listed are suggested retail prices (valid until 31st May 2013). Inch products and combined inch/metric products are generally intended 635
for sale to the United Kingdom only. All products to be sold to commercial customers. Therefore VAT is not included. Product illustrations are
without obligation. Product descriptions respectively capability characteristics are only binding when explicitly agreed upon. * Please contact
Mitutoyo for more information on delivery times. mitutoyo@mitutoyo-tools.ru
www.mitutoyo-tools.ru