Mitutoyo - Полный каталог инструмента - 2012-2013 Английский язык
для размещения заказа - mitutoyo@mitutoyo-tools.ru
FS70 Microscope Unit
Specifications Series 378 - Microscope Unit for Semiconductor Inspection
Focus Method : With concentric coarse and The optical system originally developed for the best-selling FS60 models was further enhanced for
the FS70 models. It is ideal as the microscope unit of a prober station for semiconductors (all mod-
adjustment fine focusing wheels (right and left) els CE marked).
Range : 50 mm travel range, 0,1 mm/
rev. for fine adjustment, 3,8 mm/rev.
for coarse adjustment
Trinocular Erect image
tube Image
Interpupillary Siedentopf type, adjustment range :
distance 51-76mm
Field number 24
Tilt angle 0°- 20° (only - TH, - THS models)
Illumination Reflective illumination for bright field
system ( Koehler illumination, with aperture
diaphragm)
Light source 12 V / 100 W fibre-optic, non-stopped
adjustment, light guide length 1.5m,
power consumption 150W
Objectives M Plan Apo, M Plan Apo SL, G Plan Apo
lens (optional) FS70Z FS70L FS70L4
_____________ _______________________________
FS-70 • The FS70L supports three YAG laser
wavelengths (1064 nm, 532 nm and
355 nm), while the FS70L4 supports
two wavelengths (532 nm and 266 nm), Model FS70 FS70-TH FS70Z FS70Z-TH
No. 378-184-1 378-184-3* 378-185-1* 378-185-3*
thus expanding the scope of laser FS70-THS FS70Z-THS
Model short base FS70-S FS70Z-S
applications, allowing laser-cutting of Order No. 378-184-4 378-185-4
378-184-2 378-185-2
thin-films used in semiconductors and short base model 100/0 or 0/100 100/0 or 0/100
Optical pass ratio 50/50 1X 50/50 1X, 2X zoom
liquid crystal substrates. 1X 1X, 2X zoom C-mount (using
Tube lens C-mount (using C-mount (using optional adapter B)
However, Mitutoyo assumes no C-mount (using optional adapter B) optional adapter B)
Camera mount optional adapter B) 13.2 kg
responsibility whatever for the 13.6 kg 14.1 kg
Loading (*) 14.5 kg 7.5 kg
performance and/or safety of the laser Mass 7.1 kg 6.6 kg
6.1 kg
system used with Mitutoyo (main unit)
microscopes. A careful examination is
recommended when selecting a laser-
emission unit.
• Bright field, Differential Interference (*) Loading on optical tube excluding weight of objective lenses and eyepieces.
Contrast (DIC) and polarized
observations are standard with the Model FS70L FS70L-TH FS70L4 FS70L4-TH
FS70Z. The FS70L and FS70L4 do not No. 378-186-1* 378-186-3* 378-187-1* 378-187-3*
support the DIC method. FS70L-THS FS70L4-THS
Model short base FS70L-S FS70L4-S
• By employing an inward-leaning Order No. 378-186-4 378-187-4
turret, the long working distance 378-186-2 378-187-2
objectives provide excellent operability. short base model 100/0 or 0/100 100/0 or 0/100
Optical pass ratio 100/0 or 0/100 Built-in laser beam 100/0 or 0/100 Built-in laser beam
Built-in laser beam Built-in laser beam
Protective filter filter filter
filter 1X filter 1X
Tube lens 1X 1064/532/355 nm 1X 532/266 nm
Applicable laser 1064/532//355 nm 532/266 nm C-mount receptacle
C-mount receptacle (with green filter
Camera mount Use a laser with TV Use a laser with TV (with green filter switch)
port. port. switch)
M Plan UV
Refer to the Microscope Units and objective lenses Objective, optional M/LCD Plan NIR M/LCD M/LCD Plan NIR M/LCD M Plan UV
brochure (for laser-cutting) 13.1 kg
Plan NUV Plan NUV 13.9 kg
7.5 kg
Loading (*) 14.2 kg 13.5 kg 6.7 kg
Mass 6.4 kg 7.2 kg
(main unit)
(*) Loading on optical tube excluding weight of objective lenses and eyepieces.
The prices listed are suggested retail prices (valid until 31st May 2013). Inch products and combined inch/metric products are generally intended 501
for sale to the United Kingdom only. All products to be sold to commercial customers. Therefore VAT is not included. Product illustrations are
without obligation. Product descriptions respectively capability characteristics are only binding when explicitly agreed upon. * Please contact
Mitutoyo for more information on delivery times. mitutoyo@mitutoyo-tools.ru
www.mitutoyo-tools.ru