Mitutoyo - Полный каталог инструмента - 2012-2013 Английский язык
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VMU Video Microscope Unit
Series 378 Specifications
Magnification of tube 1X
The VMU is a compact, lightweight, and easy-to-install microscope unit for CCD camera monitor-
ing in semiconductor fabrication facilities. Reflected illumination - Telecentric system with
• The optical system features ultralong working distance objectives and correction for the wide aperture stop system
- Fibre-optic illuminator
range of radiation wavelengths in use. (optional) is required
• Fibre-optic reflected illumination keeps the workpiece free from thermal expansion. The fibre-
Light source Halogen bulb (21V, 150W)
optic illuminator is required for the light source. (optional)
• Also available with a laser mount or turret (objective mount).
Objective lenses for M Plan Apo, M Plan Apo SL, G
bright field observation Plan Apo
(Optional accessory)
Objective lenses for M plan Apo NIR, LCD Plan
laser cutting Apo NIR, M Plan Apo NUV
(Optional accessory) and LCD Plan Apo NUV
Objective lenses for M Plan UV (for 378-514 only)
laser machining
(Optional accessory)
VMU-H Refer to the microscope units
378-506 and objective lenses brochure
VMU-V
378-505
VMU-LB VMU-L4B
378-513 378-514
Selection Guide to System Configuration
(Depends on each system configuration)
No. Applicable Wavelength Vertical CCD Horizontal YAG laser Fibre optic Mass
camera CCD cam- mount illumination
mount era mount 570 g
Yes Yes unit 590 g
Yes Yes
378-505 Near-infrared and visible radiation Yes
378-506 Yes 1270 g
378-513 Near-infrared and visible radiation Yes
Yes 1300 g
378-514* Near-infrared, visible,
near-ultraviolet radiation
Near infrared, visible, near ultraviolet and
ultraviolet radiation
502 The prices listed are suggested retail prices (valid until 31st May 2013). Inch products and combined inch/metric products are generally intended
for sale to the United Kingdom only. All products to be sold to commercial customers. Therefore VAT is not included. Product illustrations are
without obligation. Product descriptions respectively capability characteristics are only binding when explicitly agreed upon. * Please contact
Mitutoyo for more information on delivery times.
mitutoyo@mitutoyo-tools.ru
www.mitutoyo-tools.ru