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 Image Correlation and the MICSYS Two-Dimensional Encoder

Principle of measurement
When a rough-surfaced object is irradiated with a laser beam, reflected coherent light scattering from the surface creates visible
interference in the form of a speckle pattern. As the object moves in the XY plane, the speckle pattern also moves in response.
Displacement of the object can be calculated by comparing, through image correlation, the speckle images obtained before and
after movement, and this is the principle used in the highly accurate MICSYS measuring system.

Applications                                                                         Measure displacement caused by
  1. Evaluation of stages used in manufacturing equipment and inspection systems     temperature, humidity, voltage
                                                                                     fluctuation or other factors
                                                                           Actuator

          a) Evaluation of positional repeatability	   b) Evaluation of standstill stability and drift                              H
2. Highly accurate positioning of workpieces              Setting and removal

                                         Actuator

3. Measurement of minute displacement                  Measure displacement caused by 	
                                       Load            temperature or humidity fluctuations or 	
                                                       other factors and displacement caused during
        Structure (beam)                               a material attachment process, etc.

a) Measurement of minute displacement of a structure	  b) Measurement of minute displacement of a workpiece

                                                                                     H-16

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