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Hyper MF/MF-U Microscope
SERIES 176 – High-Accuracy Measuring Microscopes
• The world's highest XY measuring accuracy of • High operability and repeatability. Technical Data: Hyper MF
(0.9+3L/1000) m. • Three-axis motorized control.
• Selectable LAF (Laser Auto Focus) function. • Power-drive auto focus unit is a standard feature. Observation image: Erect image
Optical tube: Monocular or binocular tube (optional,
Hyper MF-U depression: 25), Reticle projection
Shown with optional optical method, with TV mount, Optical path
tube, turret and objectives ratio (eyepiece/TV mount: 50/50)
Eyepiece lens
(optional): 10X, 15X, 20X
Objective: 3X (375-037-1), W.D.: 77.0 mm
Optional: 1X, 5X 10X, 20X, 50X, 100X
Transmitted illumination
Light source: Halogen bulb (12V, 100W) (fibre-optic
cold light illumination)
Optical system: Telecentric illumination with adjustable
aperture diaphragms
Functions: Light intensity adjustable, 100 steps
brightness adjustment
Surface illumination
Light source: Halogen bulb (12V, 50W)
Optical system: Koehler illumination with adjustable
aperture diaphragms
Functions: Light intensity adjustable, 100 steps
brightness adjustment
Data output: Via RS-232C interface
Power supply: 100/110/120/220/240V AC, 50/60Hz
Dimensions: 880x913x730 mm (main unit),
160x476x381 mm (power unit)
Mass: 250 kg (main unit), 14 kg (power unit)
Technical Data: Hyper MF-U
Observation image: Erect image
Optical tube: Siedentoph type (pupil distance
adjustment: 51-76 mm), 1X tube lens,
Binocular tube (depression: 25),
Reticle projection method, with TV
mount, Optical path ratio (eyepiece/TV
mount: 50/50)
Eyepiece lens: 10X (field No.: 24 mm),
Optional: 15X, 20X
Turret (optional): Power
Objective (optional): M/BD Plan Apo objective from 1X to
100X
Transmitted illumination
Light source: Halogen bulb (12V, 100W)
Optical system: Telecentric illumination with adjustable
J aperture diaphragms
Functions: Light intensity adjustable, 100 steps
brightness adjustment
Surface illumination
Light source: Halogen bulb (12V, 50W)
Optical system: Koehler illumination with adjustable
aperture diaphragms
Functions: Light intensity adjustable, 00 steps
brightness adjustment
Data output: Via RS-232C interface
Power supply: 100/110/120/220/240V AC, 50/60Hz
SPECIFICATIONS Dimensions: 880x913x770 mm (main unit),
160x476x381 mm (power unit)
Model Hyper MF-B2515B Hyper MF-UD2515B Mass: 255 kg (main unit), 14 kg (power unit)
Code No.
Observation type 176-430E 176-432E
XY stage travel range
Z-axis travel range BF BF or BF/BD
Measurement method
Resolution 250 x 150 mm
Measuring accuracy (at 20C)
Drive system (X, Y, Z-axis) 150 mm
XY stage top size
Effective glass size Linear encoder
Swivel function
Max. stage loading 0.01 µm
Max. workpiece height
Price (0.9+3L/1000) m, L = XY plane measuring length (mm) when not loaded
Motor-driver control with the joystick
460 x 350 mm
300 x 200 mm
±3
30 kg
150 mm
POA POA
J-15 Mitutoyo operates a policy of continuous improvement that aims to provide the customer with the benefit of the latest technological advances.
Therefore the company reserves the right to change any or all aspects of any product specification without notice.
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