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Optional Accessories DIMENSIONS
See pages J-11 and J-12 for Hyper MF models. Unit: mm
See pages J-13 and J-14 for Hyper MF-U models.
730
470
262
880 913
Hyper MF
770
676
262
880 913
Hyper MF-U
Three-axis motor-driven joystick Highly accurate digital scales J
The X, Y, and Z axes are driven and controlled These microscopes are equipped with highly
with one joystick that serves as the nerve centre of accurate digital glass scales on all three axes.
operation. Speed control is possible from high- Mitutoyo produces glass scales in an underground
speed traverse of the stage to ultra low-speed, laboratory where the temperature and humidity are
precise positioning of a workpiece. constant throughout the year. The XY (stage) and Z
(optical tube) displacements are displayed digitally.
Large, highly accurate XY stage LAF optical tube
The LAF (Laser Auto Focus) optical tube can
The XY stage is a massive, highly stable design be selected. The LAF system achieves high
created using mechanical techniques developed repeatability when measuring minute steps, etc.,
over Mitutoyo’s long years of experience in enabling difficult measurements with minimum
manufacturing precision measuring microscopes. fatigue. *Available for model MF-U only
Maximum stage loading is 30 kg and a range of
useful fixtures is available that includes a wafer AF optical path
holder and swivel-centre support.
The LAF uses a low-power
laser that corresponds to
Class 2 (visible radiation) of
JIS C6802/1997, Safety of
Laser Products.
Mitutoyo operates a policy of continuous improvement that aims to provide the customer with the benefit of the latest technological advances. J-16
Therefore the company reserves the right to change any or all aspects of any product specification without notice.
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