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Microscope Head FS70 Technical Data
SERIES 378 – Microscope Head for Semiconductor Inspection and Repair Focus adjustment
Method: With concentric coarse and fine
• A versatile microscope head typically used as an OEM product suitable for fitting to specialist machines, focusing wheels (right and left)
such as those designed for inspection and repair of semiconductor wafers. Range: 50 mm travel range, 0.1 mm/rev. for
• Excellent operability is provided by the inwardly rotating turret and high quality, long working-distance fine adjustment, 3.8 mm/rev. for coarse
objectives. adjustment
• Ideal as the microscope unit of a prober station for semiconductors. Functions: Light intensity adjustable, 100 steps
• Ergonomic design with combined knob for coarse- and fine-focus adjustment. brightness adjustment
• The FS70L supports three YAG laser wavelengths (1064 nm, 532 nm and 355 nm), while the FS70L4 Trinocular tube image: Erect image
supports two wavelengths (532 nm and 266 nm), thus expanding the scope of laser applications, Interpupillary distance: Siedentopf type,
allowing laser-cutting of thin-films used in semiconductors and liquid crystal substrates. However, adjustment range: 51-76 mm
please note that Mitutoyo assumes no responsibility whatever for the performance and/or safety of the Field number: 24
laser system used with Mitutoyo microscopes. Careful examination and testing is recommended when Tilt angle: 0°- 20° (only - TH, - THS models)
selecting a laser source. Illumination system: Reflective illumination for bright field
• Bright field, Differential Interference Contrast (DIC) and polarized observation capabilities are standard (Koehler illumination, with aperture
with the FS70Z. The FS70L and FS70L4 do not support the DIC method. diaphragm)
Light source: 12V / 100W fibre-optic, non-stopped
adjustment, light guide length 1.5 m,
power consumption 150W
Objective lenses: M Plan Apo, M Plan Apo SL, G Plan Apo
(optional accessories)
FS70Z FS70L FS70L4
SPECIFICATIONS FS70 FS70-TH FS70Z FS70Z-TH
J Standard model 378-184-1 378-184-3 378-185-1 378-185-3
Code No. FS70-S FS70-THS FS70Z-S FS70Z-THS
Short-base model 378-184-2 378-184-4 378-185-2 378-185-4
Code No.
Optical pass ratio 50/50
Tube lens
Camera mount 1X 1X, 2X zoom
Loading*1
Mass C-mount (using optional adapter B)
Price
14.5 kgf 13.6 kgf 14.1 kgf 13.2 kgf
6.1 kg 7.1 kg 6.6 kg 7.5 kg
POA POA POA POA
Standard model FS70L FS70L-TH FS70L4 FS70L4-TH
Code No. 378-186-1 378-186-3 378-187-1 378-187-3
Short-base model FS70L-S FS70L-THS FS70L4-S FS70L4-THS
Code No. 378-186-2 378-186-4 378-187-2 378-187-4
Optical pass ratio 100/0 or 0/100
Protective filter Built-in laser beam filter
Tube lens 1X
Applicable laser wavelengths 1064/532/355 nm 532/266 nm
Camera mount Use a laser with TV port C-mount receptacle (with green filter switch)
Objective, optional (for laser- M/LCD Plan NIR M/LCD M Plan UV
cutting) Plan NUV
Loading*1
14.2 kgf 13.5 kgf 13.9 kgf 13.1 kgf
Mass 6.4 kg 7.2 kg 6.7 kg 7.5 kg
Price POA POA POA POA
*1 Allowable loading on optical tube excluding weight of objective lenses and eyepieces.
J-17 Mitutoyo operates a policy of continuous improvement that aims to provide the customer with the benefit of the latest technological advances.
Therefore the company reserves the right to change any or all aspects of any product specification without notice.
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