Mitutoyo - Полный каталог инструмента - 2014 Английский язык
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Technical Data Microscope Video Unit VMU
Magnification of tube: 1X SERIES 378 – Microscope Video Unit for Semiconductor Inspection and Repair
Reflected illumination: Telecentric system with aperture stop
system; Fibre-optic illuminator • The VMU is a compact, lightweight and easy-to-install microscope unit for CCD camera monitoring in
(optional) is required semiconductor fabrication facilities.
Light source: Halogen bulb 21V, 150W (optional) • An optical system featuring ultra-long working-distance objectives and correction for the wide range of
Objective lenses for wavelengths in current use.
bright field observation: M Plan Apo, M Plan Apo SL, G Plan Apo • Reflected illumination keeps the workpiece free from thermal expansion (the fibre-optic illuminator is
(optional accessories) required).
• Also available with a laser mount or turret (objective mount).
Objective lenses for
laser cutting: M Plan Apo NIR, LCD Plan Apo NIR,
M Plan Apo NUV and LCD Plan Apo
NUV (optional accessories)
Objective lenses for
laser machining: M Plan UV for 378-514 only (optional
accessories)
VMU-V VMU-H
VMU-LB J
VMU-L4B
SPECIFICATIONS 378-505 378-506 378-513 378-514
Near infrared, visible,
Code No. Near infrared,visible Near infrared, visible,
near ultraviolet near ultraviolet,
Applicable wavelengths — ultraviolet
—
Vertical CCD camera mount — — — —
Horizontal CCD camera mount
YAG laser mount
Fibre optic illumination unit
mount 0.57 kg 0.59 kg
Mass POA POA 1.27 kg 1.3 kg
Price POA POA
Mitutoyo operates a policy of continuous improvement that aims to provide the customer with the benefit of the latest technological advances. J-18
Therefore the company reserves the right to change any or all aspects of any product specification without notice.
mitutoyo@mitutoyo-tools.ru www.mitutoyo-tools.ru